High Q Silicon Nitride Waveguide Resonators ‒ K Lab ‐ EPFL
Figure 1 Silicon nitride Si3N4 microresonators with free spectral range of 100 GHz a Scanning electronic microscop imae of the resonator and bus waveguide b False color chip crossection in cthe coupling region of the bus waveguide and microresonator Silicon nitride
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CHARACTERIZATION OF SILICON NITRIDE WAVEGUIDE
CHARACTERIZATION OF SILICON NITRIDE WAVEGUIDE PRODUCED BY R F SPUTTERING TECHNIQUE Mohd Kamarulzaki Mustafa1 2 Uzair Majeed1 2 and Nafarizal Nayan1 3 1Microelectronics and NanotechnologyShamsuddin Research Centre University Tun Hussein Onn Malaysia 2Faculty of Science Technology and Human Development University Tun Hussein Onn
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Dispersion Optimization of Silicon Nitride Waveguides for
Silicon nitride waveguides have emerged as an excellent platform for photonic applications including nonlinear optical signal processing owing to their relatively high Kerr nonlinearity negligible two photon absorption and wide transparent bandwidth
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Silicon nitride based photonics imec
low waveguide loss <2 dB/cm undetectable auto fluorescence ideal for spectrometers possibility to post process silicon nitride photonics on CMOS such as imagers Both LPCVD and PECVD can be used for integrated photonic applications such as lidar/optical beamforming and standalone sensors spectrometers for life sciences 3
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Integrated Ultra Low Loss Silicon Nitride Waveguide Coil
Waveguide width and thickness are the primary parameters in determining waveguide loss bend limitations and crossing loss 2 The waveguide schematic is shown in Fig 1 a where w=5μm and t1=60nm Fabrication begins on a 0 5mm thick 100mm diameter silicon substrate upon which 15μm of thermal SiO 2 is grown The core Si 3N 4
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Dispersion engineered silicon nitride waveguides for mid
We numerically demonstrate the generation of a mid infrared supercontinuum SC through the design of an on chip complementary metal oxide semiconductor compatible 10 mm long air clad rectangular waveguide made using stoichiometric silicon nitride Si 3 N 4 as the core and MgF 2 glass as the lower cladding The proposed waveguide is designed for pumping in both the anomalous and all
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Silicon Nitride Waveguide UniversityWafer Inc
Silicon Nitride WaveguideSubstrates and Services Provided Clients fabricate SiN waveguides using contact lithography and pattern designs with waveguides with widths varying from 0 8 microns to 2 0 microns each of which has a straight reference waveguides and spiral waveguides with a set of lengths 1 2 4 and 8cm for cut back measurements
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Silicon nitride double tip fiber to waveguide edge
Silicon nitride fiber to waveguide inverse taper edge couplers with double tips are designed and simulated Double tip edge couplers show a coupling efficiency improvement over single tip couplers at visible wavelengths which is crucial for loss sensitive quantum optics applications A loss optimized 2 1 MMI coupler is designed for use as a mode converter in double tip edge couplers
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Sub micron silicon nitride waveguide fabrication using
This type of waveguide can also be designed to have strong evanescent field in the trenches for enhanced interaction with micro fluid or plasmonic coating in sensing applications Figure 3 e shows the calculated dispersion of the silicon nitride waveguide Both the TM and TE
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Silicon Nitride in Silicon Photonics IEEE Journals
Silicon Nitride in Silicon Photonics Abstract The silicon nitride Si 3 N 4 planar waveguide platform has enabled a broad class of low loss planar integrated devices and chip scale solutions that benefit from transparency over a wide wavelength range
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Silicon nitride waveguide as a power delivery component
We study the weakly guided silicon nitride waveguide as an on chip power delivery solution for dielectric laser accelerators DLAs We focus on the two main limiting factors on the waveguide network for DLAs the optical damage and nonlinear characteristics The typical delivered fluence at the ons
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Silicon nitride waveguide optical filter components for
Silicon nitride SiN waveguide based micro ring/racetrack resonators to be used as filters in the Chirp Managed Lasers CMLs are modelled and demonstrated over the standard silicon Si wafer The development of these racetrack resonators with a narrow free spectral range
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Integrated Ultra Low Loss Silicon Nitride Waveguide Coil
Waveguide width and thickness are the primary parameters in determining waveguide loss bend limitations and crossing loss The waveguide schematic is shown in Fig 1 a where w=5μm and t1=60nm Fabrication begins on a 0 5mm thick 100mm diameter silicon substrate upon which 15μm of thermal SiO2 is grown The core Si3N4 layer is deposited using low pressure chemical vapor deposition LPCVD The core is defined with a single lithographic step and dry etch designed for vertical sidewalls and low sidewall roughness The upper SiO2 cladding is deposited using reactive co sputtering with t2=3μm Further details can be found in Because two inputs are required the coil is a spiral with a tight inner bend near the bend limit of the waveguide geometry The waveguide
Get PriceSilicon Nitride Background in Nanophotonic Waveguide
Recent studies have shown that evanescent Raman spectroscopy using a silicon nitride SiN nanophotonic waveguide platform has higher signal enhancement when compared to free space systems However signal to noise ratio from the waveguide at a low analyte concentration is constrained by the shot noise from the background light originating from
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Monolithically Integrated Multilayer Silicon Nitride on
In this paper we review and provide additional details about our progress on multilayer silicon nitride SiN on silicon Si integrated photonic platforms In these platforms one or more SiN waveguide layers are monolithically integrated onto a Si photonic layer This paper focuses on the development of three layer platforms for the O and SCL bands for very large scale photonic
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Silicon Photonic Platform for Passive Waveguide Devices
silicon nitride depend on the deposition conditions A silicon rich higher refractive index or nitride rich lower refractive index waveguide can be achieved by changing the N/Si ratio 4 The high TO coefficient of silicon makes silicon waveguide devices strongly sensitive to temperature variations especially Yikai Su received his Ph D
Get PriceOctave spanning supercontinuum generation in a silicon
silicon rich nitride waveguide when pumped by femtosecond pulses from an erbium fiber laser The pulse energy and bandwidth are comparable to results achieved in stoichiometric silicon nitride waveguides but our material platform is simpler to manufacture
Get PriceCoupling Si3N4 waveguide to SOI waveguide using
Silicon nitride Si 3 N 4 planar waveguide platform combined with silicon on insulator SOI devices offer a whole new generation of system on chip applications Therefore efficient coupling of an Si 3 N 4 waveguide to an SOI waveguide is essential We present a coupler to interface a 1 8 μ m wide Si 3 N 4 waveguide to a 0 5 μ m wide SOI waveguide based on the focusing property of the
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Optical frequency comb generation with low temperature
The chromium mask was removed after etching and no metal diffusion was observed in the silicon nitride waveguide Figure 2 a shows an optical microscope image of the etched microring resonator Figure 2 b shows a scanning electron microscope SEM close up image of the microring and bus waveguide coupling region
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Ultralow loss silicon nitride waveguides for nonlinear optics
Silicon nitride is a dielectric material featuring a relatively large nonlinear index coefficient and a broadband transparency window from ultraviolet to mid infrared Its refractive index contrast to silica allows high confinement and controlling the dispersion with the waveguide geometry This material platform has emerged in the past years
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Th3J 1 Silicon Photonics Silicon Nitride Versus Silicon
Abstract Silicon photonics typically builds on a silicon on insulator based high index contrast waveguide system Silicon nitride provides an alternative moderate index contrast system that is manufacturable in the same CMOS environment This paper
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Dispersion Optimization of Silicon Nitride Waveguides for
Silicon nitride waveguides have emerged as an excellent platform for photonic applications including nonlinear optical signal processing owing to their relatively high Kerr nonlinearity negligible two photon absorption and wide transparent bandwidth In this paper we propose an effective approach using 3D finite element method to optimize the dispersion characteristics of silicon nitride
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th Fabrication of Photonic LPCVD Silicon Nitride
materials Silicon Nitride waveguides have only been fabricated one other time at RIT and were used for MEMS evaluations These waveguides were not optimized and the quality of the waveguide was not inspected for photonic use Nitride is an ideal material for
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Dispersion engineered silicon nitride waveguides for mid
We numerically demonstrate the generation of a mid infrared supercontinuum SC through the design of an on chip complementary metal oxide semiconductor compatible 10 mm long air clad rectangular waveguide made using stoichiometric silicon nitride Si 3 N 4 as the core and MgF 2 glass as the lower cladding The proposed waveguide is designed for pumping in both the anomalous and all
Get Price
Silicon Nitride Waveguide UniversityWafer Inc
Silicon Nitride WaveguideSubstrates and Services Provided Clients fabricate SiN waveguides using contact lithography and pattern designs with waveguides with widths varying from 0 8 microns to 2 0 microns each of which has a straight reference waveguides and spiral waveguides with a set of lengths 1 2 4 and 8cm for cut back measurements
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Nonlinear silicon nitride waveguides based on a PECVD
Abstract In this work we present a nonlinear silicon nitride waveguide These waveguide are fabricated by readily available PECVD conventional contact UV lithography and high temperature annealing techniques thus dramatically reducing the processing complexity and cost By patterning the waveguide structures firstly and then carrying out a
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A silicon nitride waveguide integrated chemical vapor
We demonstrate a high speed chemical vapor deposited graphene on silicon nitride waveguide photodetector The device is designed with grating like metal contact to reduce the channel spacing Benefiting from the narrow channel spacing a calculated transit time limited bandwidth of 111 GHz is derived The re Graphene Turns 15 Bio implications and Bio applications
Get PriceIntegration of silicon nitride waveguide in Ge on
The main advantages of silicon nitride over Si waveguides are its broader transparency window down to visible wavelengths no suffering from two photon and free carrier absorption over the telecommunication wavelength ranges 8 and easier for 3D monolithic integration 9
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2μm mid infrared silicon rich silicon nitride/silicon
Although silicon rich silicon nitride SRN waveguide has relative low nonlinear Kerr coefficient compared to silicon waveguide SRN is still a potential material for nonlinear applications since it has very low propagation loss and is void of TPA and FCA losses
Get PriceSilicon Nitride Waveguides for Plasmon Optical Trapping
Keywords silicon nitride trench waveguide optical trapping micro fluidic channel bowtie antenna gradient force 1 INTRODUCTION A novel approach of silicon nitride trench waveguide has been put forward recently with the ability to combine microfluidic channel and waveguide together 1 2
Get PriceUltralow loss silicon nitride waveguides for nonlinear optics
waveguide with a demonstrated gain of 9 5 dB and noise figure of 1 2 dB when operated in phase sensitive mode Keywords silicon nitride ultralow loss integrated waveguide Kerr nonlinear op tics DKS microcombs parametric amplifiers i
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Silicon nitride waveguide platform for fluorescence
Here we develop and report a low loss silicon nitride Si 3 N 4 waveguide platform for multi color TIRF microscopy Single mode conditions at visible wavelengths nm were achieved using shallow rib geometry To generate uniform excitation over appropriate dimensions waveguide bends were used to filter out higher modes followed by
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Silicon Nitride Waveguides and Spot Size Converters with
Keywords silicon nitride integrated photonics spot size converters edge coupling 1 INTRODUCTION The silicon nitride waveguide platform is especially interesting for applications at visible and near infrared wavelengths such as optical coherence tomography OCT 1 2 which requires broadband low loss photonic integrated circuits PICs
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A high efficiency silicon nitride waveguide grating
The silicon nitride waveguide with a width of 1 0 μm and a thickness of 325 nm functions in a single mode condition The insert of Fig 5 shows the field distribution of the fundamental mode
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Nonlinear optical interactions in silicon waveguides
In fact supercontinuum generation at these wavelengths in a silicon nitride waveguide was successfully demonstrated For this experiment a partially underetched LPCVD Si 3 N 4 waveguide similar as in the inset of Figure 5 was used The waveguide was 500 nm wide and 300 nm high the etch that removed the oxide below was 150 nm deep
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Silicon Nitride in Silicon Photonics
One of the first reported silicon nitride/silicon diox ide Si 3N 4/SiO 2 waveguides was a single mode channel waveguide 20 with 1–2 dB/cm propagation loss These early stage losses compared favorably to today s state of the art SOI waveguide losses∼0 3 dB/cm 21 and optical fiber 0 4160 dB/km record loss 22 Efforts focused on
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